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Solar Cell Manufacturing Equipment

  HPE450 Series PECVD System

Deposition films of SiN,SiO,ALO

Wafer loading ≥416pcs/batch/tube

Uniformity WIW≤±3%,WTW≤±3%,BTB≤±2%

Integrated PID-Free solution

Continuously deposition complex films at front and rear face of cells fastly

In-line automation process

PERC process interface

Optimized CCRM and MES software

Up-time > 98%